JPH0272543U - - Google Patents

Info

Publication number
JPH0272543U
JPH0272543U JP15100588U JP15100588U JPH0272543U JP H0272543 U JPH0272543 U JP H0272543U JP 15100588 U JP15100588 U JP 15100588U JP 15100588 U JP15100588 U JP 15100588U JP H0272543 U JPH0272543 U JP H0272543U
Authority
JP
Japan
Prior art keywords
fixed side
photocoupler
support plate
elevating device
guided
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15100588U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15100588U priority Critical patent/JPH0272543U/ja
Priority to US07/423,043 priority patent/US5003188A/en
Publication of JPH0272543U publication Critical patent/JPH0272543U/ja
Pending legal-status Critical Current

Links

JP15100588U 1988-11-18 1988-11-18 Pending JPH0272543U (en])

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP15100588U JPH0272543U (en]) 1988-11-18 1988-11-18
US07/423,043 US5003188A (en) 1988-11-18 1989-10-18 Semiconductor waxer detection system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15100588U JPH0272543U (en]) 1988-11-18 1988-11-18

Publications (1)

Publication Number Publication Date
JPH0272543U true JPH0272543U (en]) 1990-06-01

Family

ID=31424662

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15100588U Pending JPH0272543U (en]) 1988-11-18 1988-11-18

Country Status (1)

Country Link
JP (1) JPH0272543U (en])

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