JPH0272543U - - Google Patents
Info
- Publication number
- JPH0272543U JPH0272543U JP15100588U JP15100588U JPH0272543U JP H0272543 U JPH0272543 U JP H0272543U JP 15100588 U JP15100588 U JP 15100588U JP 15100588 U JP15100588 U JP 15100588U JP H0272543 U JPH0272543 U JP H0272543U
- Authority
- JP
- Japan
- Prior art keywords
- fixed side
- photocoupler
- support plate
- elevating device
- guided
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003028 elevating effect Effects 0.000 claims 3
- 235000012431 wafers Nutrition 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 1
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15100588U JPH0272543U (en]) | 1988-11-18 | 1988-11-18 | |
US07/423,043 US5003188A (en) | 1988-11-18 | 1989-10-18 | Semiconductor waxer detection system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15100588U JPH0272543U (en]) | 1988-11-18 | 1988-11-18 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0272543U true JPH0272543U (en]) | 1990-06-01 |
Family
ID=31424662
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15100588U Pending JPH0272543U (en]) | 1988-11-18 | 1988-11-18 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0272543U (en]) |
-
1988
- 1988-11-18 JP JP15100588U patent/JPH0272543U/ja active Pending
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